Development of piezoelectric XYγ positioning device using impulsive force (2nd Report) - improvement of motion characteristic with friction control

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Isobe, Hiromi

Kato, Shigeyasu

Kyusojin, Akira

Moriguti, Takanari

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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1998年 / 64卷 / 03期

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页码：408 / 412

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