Ultrathin films to modify mechanical and tribological behavior of mems components

被引：0
|
作者：
Rymuza, Z. [1 ]
机构：
[1] Warsaw University of Technology, Department of Mechatronics, Institute of Micromechanics and Photonics, Sw.A. Boboli 8, 02-525 Warsaw, Poland
来源：
Journal of ASTM International | 2005年 / 2卷 / 02期
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学科分类号：
摘要：
61
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页码：123 / 138
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