Surface passivation of In0.53Ga0.47As ridge quantum wires using silicon interface control layers

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Fujikura, Hajime
Kodama, Satoshi
Hashizume, Tamotsu
Hasegawa, Hideki
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1996年 / 14卷 / 04期
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