RELAXATION PROCESSES IN RAPIDLY DEPOSITED THIN FILMS.

被引：0
|
作者：
Bykovskii, Yu.A.
Loshchinin, M.B.
Manykin, E.A.
Ozhovan, M.I.
Poluektov, P.P.
机构：
来源：
Soviet physics. Technical physics | 1981年 / 26卷 / 09期
关键词：
Compendex;
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摘要：
FILMS
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页码：1111 / 1114
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