Large-area high-density plasma excitation using standing pure and hybrid surface waves

被引：0
|
作者：
Ghanashev, I. [1 ]
Nagatsu, M. [1 ]
Morita, S. [1 ]
Sugai, H. [1 ]
机构：
[1] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1998年 / 16卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1537 / 1541
相关论文
共 50 条
  • [41] Role of helicon waves on high-density plasma production
    Yasaka, Yasuyoshi, 1600, JJAP, Minato-ku, Japan (33):
  • [42] ROLE OF HELICON WAVES ON HIGH-DENSITY PLASMA PRODUCTION
    YASAKA, Y
    HARA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (10): : 5950 - 5958
  • [43] Large-area uniform surface treatment of polymeric materials using a scanning plasma method
    Yang, SC
    Yanagi, J
    Yamamoto, K
    Uyama, H
    Fujiyama, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (7B): : 4527 - 4530
  • [44] Large-area uniform surface treatment of polymeric materials using a scanning plasma method
    Yang, Sung-Chae
    Yanagi, Junichi
    Yamamoto, Kyoichi
    Uyama, Haruo
    Fujiyama, Hiroshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (7 B): : 4527 - 4530
  • [45] Feasibility study of material surface treatment using an atmospheric large-area glow plasma
    Moon, SY
    Han, JW
    Choe, W
    THIN SOLID FILMS, 2006, 506 : 355 - 359
  • [46] Novel high-density plasma tool for large area flat panel display etching
    Heinrich, F
    Banziger, U
    Jentzsch, A
    Neumann, G
    Huth, C
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 2000 - 2004
  • [47] High-density hydrogen plasma production in a simple torus using helicon waves
    Sakawa, Y
    Shoji, T
    PLASMA PHYSICS, 2003, 669 : 40 - 43
  • [48] Controlling current density distribution over large-area plasma emitter
    V. Ya. Martens
    E. F. Shevchenko
    Technical Physics Letters, 2011, 37
  • [49] Controlling current density distribution over large-area plasma emitter
    Martens, V. Ya.
    Shevchenko, E. F.
    TECHNICAL PHYSICS LETTERS, 2011, 37 (04) : 379 - 382
  • [50] Ion nitriding of pure iron using high-density plasma beam generated by a tubular plasma source
    Li, S. L.
    Ma, C. Y.
    Zhang, Q. Y.
    Ren, C. S.
    Lu, W. Q.
    SURFACE & COATINGS TECHNOLOGY, 2017, 309 : 47 - 53
12345