IR spectroscopic ellipsometry: Instrumentation and results

被引：43
|
作者：
Roeseler, A. [1 ]
机构：
[1] Inst fuer Spektrochemie und, angewandte Spektroskopie, Berlin, Germany
来源：
Thin Solid Films | 1993年 / 234卷 / 1 -2 pt 2期
关键词：
15;
D O I：
10.1016/0040-6090(93)90275-T
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：307 / 313
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