IR spectroscopic ellipsometry: Instrumentation and results

被引：43
|
作者：
Roeseler, A. [1 ]
机构：
[1] Inst fuer Spektrochemie und, angewandte Spektroskopie, Berlin, Germany
来源：
Thin Solid Films | 1993年 / 234卷 / 1 -2 pt 2期
关键词：
15;
D O I：
10.1016/0040-6090(93)90275-T
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：307 / 313
相关论文
共 50 条
  • [1] IR SPECTROSCOPIC ELLIPSOMETRY - INSTRUMENTATION AND RESULTS
    ROSELER, A
    THIN SOLID FILMS, 1993, 234 (1-2) : 307 - 313
  • [2] IR SPECTROSCOPIC ELLIPSOMETRY - INSTRUMENTATION AND APPLICATIONS IN SEMICONDUCTORS
    ZALCZER, G
    THOMAS, O
    PIEL, JP
    STEHLE, JL
    THIN SOLID FILMS, 1993, 234 (1-2) : 356 - 362
  • [3] SPECTROSCOPIC ELLIPSOMETRY IN IR
    KAINTHLA, RC
    BOCKRIS, JO
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C143 - C143
  • [4] SPECTROSCOPIC IR ELLIPSOMETRY WITH IMPERFECT COMPONENTS
    DENBOER, JHWG
    KROESEN, GMW
    HAVERLAG, M
    DEHOOG, FJ
    THIN SOLID FILMS, 1993, 234 (1-2) : 323 - 326
  • [5] IMPROVEMENT IN ACCURACY OF SPECTROSCOPIC IR ELLIPSOMETRY BY THE USE OF IR RETARDERS
    ROSELER, A
    MOLGEDEY, W
    INFRARED PHYSICS, 1984, 24 (01): : 1 - 5
  • [6] IR Spectroscopic Ellipsometry to Characterize Microfiltration Membranes
    Kaya, Huseyin
    Fan, Shouhong
    Kim, Seong H.
    Ding, Yifu
    Vogt, Bryan D.
    ACS APPLIED POLYMER MATERIALS, 2023, 5 (06) : 3928 - 3937
  • [7] IR spectroscopic ellipsometry for industrial characterization of semiconductors
    Boher, P
    Bucchia, M
    Piel, JP
    Defranoux, C
    Stehle, JL
    Pickering, C
    OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES II, 2001, 4449 : 69 - 78
  • [8] Terahertz time-domain spectroscopic ellipsometry: instrumentation and calibration
    Neshat, Mohammad
    Armitage, N. P.
    OPTICS EXPRESS, 2012, 20 (27): : 29063 - 29075
  • [9] Spectroscopic FT-IR-ellipsometry of anodized aluminium
    Molt, K
    Berentsen, S
    Röseler, A
    PHOTONICS IN MEASUREMENT, 2004, 1844 : 131 - 149
  • [10] Improvement of instrumentation consistency using DUV filter in Spectroscopic Ellipsometry
    Gim, Yu-Seong
    Jung, Yong-Woo
    Yi, Jong-Seok
    Lee, Kang-Won
    SOLID-STATE ELECTRONICS, 2024, 216
12345