In-situ studies of growth, defects and reconstruction at epitaxial silicide/silicon interfaces

被引：0
|
作者：
机构：
来源：
| 1600年 / Publ by Elsevier Science Publishers B.V., Amsterdam, Neth卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] In-situ studies of silicide formation during growth of molybdenum-silicon interfaces
    Reinink, J.
    Zameshin, A.
    van de Kruijs, R. W. E.
    Bijkerk, F.
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (13)
  • [2] IN-SITU STUDY OF IN-BEAM COBALT SILICIDE GROWTH IN SILICON
    RUAULT, MO
    FORTUNA, F
    BERNAS, H
    KAITASOV, O
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 84 (02): : 135 - 138
  • [3] IN-SITU STUDIES OF EPITAXIAL THIN-FILM GROWTH
    POPPA, H
    ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1964, A 19 (7-8): : 835 - &
  • [4] Nucleation and growth of epitaxial silicide in silicon nanowires
    Chou, Yi-Chia
    Lu, Kuo-Chang
    Tu, K. N.
    MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2010, 70 (3-6): : 112 - 125
  • [5] In-situ and ex-situ studies of silicon interfaces and nanostructures by ellipsometry and RDS
    Rossow, U
    Mantese, L
    Frotscher, U
    Aspnes, DE
    Richter, W
    DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II, 1996, 406 : 371 - 376
  • [6] In situ analysis of epitaxial cobalt silicide reaction on silicon (001)
    Sakamoto, K
    Maeda, T
    VACUUM, 2004, 73 (3-4) : 595 - 601
  • [7] Epitaxial growth of erbium silicide nanowires on silicon(001)
    Chen, Y
    Ohlberg, DAA
    Williams, RS
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 87 (03): : 222 - 226
  • [8] In-situ observation of MOVPE epitaxial growth
    Richter, W
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 75 (01): : 129 - 140
  • [9] In-situ observation of MOVPE epitaxial growth
    W. Richter
    Applied Physics A, 2002, 75 : 129 - 140
  • [10] LATTICE IMAGING OF SILICIDE-SILICON INTERFACES AND THE INTERPRETATION OF INTERFACIAL DEFECTS
    FOLL, H
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 69 (02): : 779 - 788
12345