Preferential sputtering review of theories and simulations

被引：0
|
作者：
Stepanova, M.G. [1 ]
机构：
[1] ANTEKh, Moscow, Russia
来源：
Vestnik Rentgenologii i Radiologii | 1994年 / 06期
关键词：
Argon - Computer simulation - Computer software - Ion beams - Mass transfer - Mathematical models - Numerical analysis - Reviews - Targets;
D O I：
暂无
中图分类号：
TG17 [金属腐蚀与保护、金属表面处理]; TQ153 [电镀工业];
学科分类号：
080503 ;
摘要：
Analytical theories of preferential sputtering under ion bombardment are compared with TRIM. SR. TRIDYN and EVOLVE simulation results. Theory was found to be in reasonable agreement with TRIM. SR and TRIDYN simulations at ion energies above 1-2 keV. At low ion energies simulation results show a marked dependence on ion mass, energy, and angle of incidence, disregarded by the theory. From comparison of the theory with EVOLVE simulations and with some new modelling results, it might be assumed that the magnitude of the bulk binding energy has a pronounced influence on the effect of preferential sputtering.
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页码：5 / 13
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