MICROSECTIONING DIFFUSION SAMPLES BY SPUTTERING.

被引：0
|
作者：
Mundy, John
Rothman, Steve
机构：
来源：
Semiconductor International | 1983年 / 6卷 / 05期
关键词：
SOLIDS; -; Diffusion;
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学科分类号：
摘要：
A new sputtering apparatus for taking thin sections from solid-state diffusion samples is described. It uses a Kaufman-type ion gun, high-yield chamber geometry, and a catcher-foil advance mechanism capable of taking 32 sections without breaking vacuum. The features of the apparatus are discussed in detail.
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页码：102 / 104
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