Contamination of silicon during ion-implantation and annealing

被引：0
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作者：
Liu, Xiao [1 ]
Pohl, R.O. [1 ]
Asher, Sally [1 ]
Crandall, R.S. [1 ]
机构：
[1] Cornell Univ, Ithaca, United States
来源：
Journal of Non-Crystalline Solids | / 227-230卷 / Pt A期
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页码：407 / 410
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