Photon/fragment-ion coincidence investigation of the continuous ultraviolet emissions produced by fast ion impact on CF4 and CHF3

被引：0

作者：

机构：

[1] Muller, U.

[2] Lange, M.

[3] Haas, W.

[4] Brenn, R.

来源：

Muller, U. | 1600年 / American Inst of Physics, Woodbury, NY, United States卷 / 100期

关键词：

Molecular physics;

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暂无

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引用

共 29 条

[1] PHOTON FRAGMENT-ION COINCIDENCE INVESTIGATION OF THE CONTINUOUS ULTRAVIOLET EMISSIONS PRODUCED BY FAST-ION IMPACT ON CF4 AND CHF3
MULLER, U
LANGE, M
HAAS, W
BRENN, R
JOURNAL OF CHEMICAL PHYSICS, 1994, 100 (08): : 5550 - 5555
[2] PHOTON FRAGMENT-ION COINCIDENCES FOLLOWING 2 MEV HE+ IMPACT ON CF4
MULLER, U
HAAS, W
BRENN, R
CHEMICAL PHYSICS LETTERS, 1993, 201 (1-4) : 387 - 390
[3] SURFACE CONTAMINATION INDUCED BY REACTIVE ION ETCHING IN CF4 AND CHF3
PANG, SW
MOUNTAIN, RW
RATHMAN, DD
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C87 - C87
[4] Reactive ion etching of piezoelectric materials in CF4/CHF3 plasmas
Leech, PW
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (04): : 2037 - 2041
[5] REACTIVE ION ETCHING OF SPUTTER DEPOSITED TANTALUM WITH CF4, CF3CL, AND CHF3
KUO, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (1A): : 179 - 185
[6] Reactive ion etching of sputter deposited tantalum with CF4, CF3Cl, and CHF3
Kuo, Yue
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (1 A): : 179 - 185
[7] UV EMISSION OF CF2 PRODUCED BY ELECTRON AND ION IMPACT OF CHF3
AARTS, JFM
CHEMICAL PHYSICS, 1985, 95 (03) : 443 - 448
[8] Dissociative ionization of CF4 and CHF3 accompanying light emission:: Fragmention-photon coincidence (FIPCO) measurements by electron impact
Furuya, K
PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS, 2002, : 381 - 392
[9] Reactive ion etching of quartz and silica-based glasses in CF4/CHF3 plasmas
Leech, PW
VACUUM, 1999, 55 (3-4) : 191 - 196
[10] Electron-impact dissociative ionization of fluoromethanes CHF3 and CF4
Torres, I
Martínez, R
Castaño, F
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 2002, 35 (11) : 2423 - 2436

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