Synthesis of diamondlike carbon and diamond films by plasma-enhanced chemical vapor deposition

被引：0
|
作者：
Hayashi, Hidetaka [1 ]
Ohnishi, Yoshihiko [1 ]
Kobashi, Koji [1 ]
Nishimura, Kozo [1 ]
Miyata, Kohichi [1 ]
Kawate, Yoshio [1 ]
机构：
[1] Kobe Steel Ltd, Japan
来源：
KOBELCO Technology Review | 1989年 / 06期
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页码：14 / 17
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