Deposition of diamond-like carbon films by low energy ion beam and d.c. magnetron sputtering

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[1] Singh, Amarjit
[2] Lavigne, Pierre
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Singh, Amarjit | 1600年 / 47期
关键词：
802 Chemical Apparatus and Plants; Unit Operations; Unit Processes - 804 Chemical Products Generally - 813 Coatings; Finishes and Thin Film Deposition - 932 High Energy Physics; Nuclear Physics; Plasma Physics;
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