Preparation of Thin Films on InP by Evaporation of PON Material.

被引：0
|
作者：
Quan, Dang Tran [1 ]
Hbib, H. [1 ]
Meinnel, J. [1 ]
Bonnaud, O. [1 ]
Falchier, P. [1 ]
Marchand, R. [1 ]
Quemerais, A. [1 ]
机构：
[1] Univ Rennes I, Rennes, Fr, Univ Rennes I, Rennes, Fr
来源：
Le Vide, les couches minces | 1988年 / 43卷 / 241期
关键词：
INDIUM PHOSPHIDE - MISFETS - PHOSPHORUS OXYNITRIDE - PON FILMS;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：239 / 240
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