Micromachining: The fabrication of microstructures and microsensors

被引：0
|
作者：
Hesketh, Peter J.
Harrison, D.Jed
机构：
来源：
Electrochemical Society Interface | 1994年 / 3卷 / 04期
关键词：
Microsensors;
D O I：
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学科分类号：
摘要：
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页码：21 / 26
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