Gettering of defects in silicon by porous silicon

被引：0
|
作者：
Huang, Yiping [1 ]
Zhu, Shiyang [1 ]
Bao, Zongming [1 ]
He, Yi [1 ]
Zhong, Huizhou [1 ]
Wu, Dongping [1 ]
机构：
[1] Fudan Univ, Shanghai, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 1998年 / 19卷 / 12期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：936 / 939
相关论文
共 50 条
  • [1] Porous silicon gettering
    Tsuo, YS
    Menna, P
    Pitts, JR
    Jantzen, KR
    Asher, SE
    AlJassim, MM
    Ciszek, TF
    CONFERENCE RECORD OF THE TWENTY FIFTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1996, 1996, : 461 - 464
  • [2] Gettering of copper by defects in silicon
    Li, Xiao-Qiang
    Yang, De-Ren
    Yu, Xue-Gong
    Wang, Lei
    Que, Duan-Lin
    Rengong Jingti Xuebao/Journal of Synthetic Crystals, 2010, 39 (SUPPL.): : 9 - 12
  • [3] Point defects, diffusion and gettering in silicon
    Gosele, U
    Conrad, D
    Werner, P
    Tong, QY
    Gafiteanu, R
    Tan, TY
    DEFECTS AND DIFFUSION IN SILICON PROCESSING, 1997, 469 : 13 - 24
  • [4] ON THE GETTERING EFFICIENCY OF CRYSTAL DEFECTS IN SILICON
    BUGIEL, E
    KITTLER, M
    BORCHARDT, A
    RICHTER, H
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 84 (01): : 143 - 147
  • [5] Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon
    Tech Phys Lett, 7 (507):
  • [6] Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon
    Kulikov, AV
    Perevoshchikov, VA
    Skupov, VD
    Shengurov, VG
    TECHNICAL PHYSICS LETTERS, 1997, 23 (07) : 507 - 508
  • [7] Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon
    A. V. Kulikov
    V. A. Perevoshchikov
    V. D. Skupov
    V. G. Shengurov
    Technical Physics Letters, 1997, 23 : 507 - 508
  • [8] Gettering technology based on porous silicon
    Lamedica, G
    Balucani, M
    Ferrari, A
    Bondarenko, V
    Yakovtseva, V
    Dolgyi, L
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, 2002, 82-84 : 405 - 410
  • [9] Preparation of porous silicon and Effect of Gettering on the Resistivity
    Guo, Suxia
    Tan, Yi
    Li, Jiayan
    Li, Yaqiong
    Liu, Chenguang
    NEW MATERIALS AND PROCESSES, PTS 1-3, 2012, 476-478 : 1794 - 1797
  • [10] Gettering of transition metals by porous silicon in epitaxial silicon solar cells
    Radhakrishnan, Hariharsudan Sivaramakrishnan
    Ahn, Chihak
    Van Hoeymissen, Jan
    Dross, Frederic
    Cowern, Nick
    Van Nieuwenhuysen, Kris
    Gordon, Ivan
    Mertens, Robert
    Poortmans, Jef
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (10): : 1866 - 1871
12345