Enhancing P-type conductivity in Mg-doped GaN using oxygen and nitrogen plasma activation

被引：0
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作者：
Hwang, Jun-Dar [1 ]
Lai, Zhca-Yong [1 ]
Wu, Ching-Yuan [1 ]
Chang, Shoou-Jinn [2 ]
机构：
[1] Department of Electrical Engineering, Da-Yeh University, 112 Shan-Jiau Rd, Da-Tsuen, Changhua, 886-510, Taiwan
[2] Department of Electrical Engineering, National Cheng Kung University, Tainan, 886-701, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2005年 / 44卷 / 4 A期
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页码：1726 / 1729
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