Bulk properties of very large diameter silicon single crystals

被引:0
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作者
von Ammon, W. [1 ]
Dornberger, E. [1 ]
Hansson, P.O. [1 ]
机构
[1] Wacker Siltronic AG, Burghausen, Germany
来源
Journal of Crystal Growth | 1999年 / 198-199卷 / pt 1期
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Number:; 01; M; 2973; A; Acronym:; -; Sponsor:;
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页码:390 / 398
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