ELECTRONIC PROPERTIES AND MODELING OF LATTICE-MISMATCHED AND REGROWN GaAs INTERFACES PREPARED BY METALORGANIC VAPOR PHASE EPITAXY.

被引:0
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作者
Ikeda, Eiji [1 ]
Hasegawa, Hideki [1 ]
Ohtsuka, Shunsuke [1 ]
Ohno, Hideo [1 ]
机构
[1] Hokkaido Univ, Sapporo, Jpn, Hokkaido Univ, Sapporo, Jpn
关键词
SEMICONDUCTING INDIUM COMPOUNDS - Surfaces - SEMICONDUCTOR DEVICES - Heterojunctions - SEMICONDUCTOR MATERIALS - Vapor Deposition;
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摘要
In order to study and model non-ideal semiconductor-semiconductor interfaces, three kinds of GaAs interfaces, i. e. , (i) a slightly mismatched InGaAs/GaAs interface, (ii) a highly mismatched GaAs/InP interface and (iii) an air-exposed GaAs/GaAs interface, were prepared by MOVPE. Their electronic properties were studied through measurements of C-V characteristics, carrier concentration profiles, DLTS spectra and I-V characteristics. By a novel interpretation of C-V characteristics and DLTS spectra, all the experimental results were explained consistently by a common model involving a U-shaped interface state continuum. The origin of the interface state continuum is explained by the disorder induced gap state (DIGS) model recently proposed for insulator-semiconductor and metal-semiconductor interfaces. This model seems to serve as a universal model for non-ideal S-S interfaces.
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页码:180 / 187
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