MULTILAYER INTERCONNECTIONS USING POLYIMIDE DIELECTRICS AND ALUMINUM CONDUCTORS.

被引：0
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作者：
Tsunetsugu, Hideki [1 ]
Takagi, Akihiro [1 ]
Moriya, Kunio [1 ]
机构：
[1] NTT, Musashino Electrical, Communication Lab, Musashino, Jpn, NTT, Musashino Electrical Communication Lab, Musashino, Jpn
来源：
| 1600年 / 08期
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5
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