Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method

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作者：
Nagasaka, H. [1 ]
Chayahara, A. [1 ]
Fujii, K. [1 ]
机构：
[1] Ebara Research Co, Ltd, Fujisawa-shi, Japan
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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 121卷 / 1-4期
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页码：279 / 282
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