Vacuum-tuned graded-index polymer waveguides on silicon substrates

被引：0
|
作者：
Gerold, Dave [1 ]
Chen, Ray T. [1 ]
机构：
[1] Microelectronics Research Center, Dept. of Elec. and Comp. Engineering, University of Texas at Austin, Austin, TX 78712-4349, United States
来源：
Applied Optics | 1996年 / 35卷 / 03期
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摘要：
A new method for producing graded-index (GRIN) profiles on type A photolime gel-based polymer waveguides with vacuum drying is demonstrated. Vacuum drying allows optical waveguides to be built on substrates with a higher index of refraction without intermediate lower-index cladding layers while keeping the concentration of various dopants unperturbed. The waveguide-loss and GRIN profiles were compared for vacuum-dried and alcohol-dried samples. Waveguide losses from 0.1 to 10 dB/cm were observed. © 1996 Optical Society of America.
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页码：400 / 403
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