Isotopic tracing of Si during thermal growth of Si3N4 ultrathin films

被引：0
|
作者：
Baumvol, I.J.R. [1 ]
Borucki, L. [1 ]
Chaumont, J. [1 ]
Ganem, J.-J. [1 ]
Kaytasov, O. [1 ]
Piel, N. [1 ]
Rigo, S. [1 ]
Schulte, W.H. [1 ]
Stedile, F.C. [1 ]
Trimaille, I. [1 ]
机构：
[1] Universidade Federal do Rio Grande, do Sul, Porto Alegre, Brazil
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1996年 / 118卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：499 / 504
相关论文
共 50 条
  • [41] Investigation of Si3N4–TiN/Si3N4–Si3N4 trilayer composites with residual surface compression
    Jow Lay Huang
    Feng Chi Chou
    Horng Hwa Lu
    Journal of Materials Research, 1997, 12 : 2357 - 2365
  • [42] Laser surface nanostructuring for reliable Si3N4/Si3N4 and Si3N4/Invar joined components
    Salvo, Milena
    Casalegno, Valentina
    Suess, Manuela
    Gozzelino, Laura
    Wilhelmi, Christian
    CERAMICS INTERNATIONAL, 2018, 44 (11) : 12081 - 12087
  • [43] Wettability of PdNi(Co)-Cr alloys on Si3N4 ceramic and joining of Si3N4 to Si3N4
    Hua-Ping Xiong
    Bo Chen
    Wan-Lin Guo
    Lei Ye
    Welding in the World, 2015, 59 : 33 - 44
  • [44] Band offsets for ultrathin SiO2 and Si3N4 films on Si(111) and Si(100) from photoemission spectroscopy
    Keister, JW
    Rowe, JE
    Kolodziej, JJ
    Niimi, H
    Madey, TE
    Lucovsky, G
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (04): : 1831 - 1835
  • [45] GRAIN-GROWTH IN SI3N4
    WALLACE, JS
    KELLY, JF
    SILICON NITRIDE 93, 1994, 89-91 : 501 - 505
  • [46] Effect of β-Si3N4 starting powder size on elongated grain growth in β-Si3N4 ceramics
    Lee, CJ
    Chae, JI
    Kim, DJ
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2000, 20 (14-15) : 2667 - 2671
  • [47] Preparation of Si3N4 ceramics by aligning α-Si3N4 whiskers
    Bi, Yu-Hui
    Li, Jun
    Chen, Fei
    Zhang, Dong-Ming
    Shen, Qiang
    Zhang, Lian-Meng
    HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2, 2008, 368-372 : 881 - 884
  • [48] Synthesis of β-Si3N4 particles from α-Si3N4 particles
    Hirata, T
    Akiyama, K
    Morimoto, T
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2000, 20 (08) : 1191 - 1195
  • [49] Superplastic forming of Si3N4 and Si3N4/SiC nanocomposites
    Rouxel, T
    Besson, JL
    Mayne, M
    Bahloul, D
    Goursat, P
    SUPERPLASTICITY IN ADVANCED MATERIALS - ICSAM-97, 1997, 243-2 : 233 - 237
  • [50] EFFECTS OF SI3N4 AND AL FILMS ON THE PASSIVATION OF POLY-SI FILMS
    RODDER, M
    MADAN, S
    ANTONIADIS, D
    KIKKAWA, T
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (12) : 1982 - 1983
12345