Photoassisted metalorganic vapor-phase epitaxy of nitrogen-doped ZnSe using tertiarybutylamine as doping source

被引：0
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作者：
Fujita, Shizuo [1 ]
Asano, Takeharu [1 ]
Maehara, Kensaku [1 ]
Fujita, Shigeo [1 ]
机构：
[1] Kyoto Univ, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1993年 / 32卷 / 8 B期
关键词：
Doping (additives) - Electroluminescence - Epitaxial growth - Nitrogen - Organometallics - Photochemical reactions;
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摘要：
Nitrogen doping into ZnSe was carried out by photoassisted metalorganic vapor-phase epitaxy using diethylzinc and dimethylselenium. Tertiarybutylamine (t-BNH2) was used as a doping source. Photoluminescence, electrical properties of Schottky diodes, and electroluminescence from ZnSe:N/n-ZnSe:Ga diodes revealed acceptor incorporation and p-type behaviour in the ZnSe:N layers. Low temperature (350°C) growth and low irradiation intensity (45 mW/cm2) were found to desirable for effective doping. As an example, for the ZnSe:N layer with nitrogen concentration of 5×1017 cm-3 revealed by secondary ions mass spectroscopy, net acceptor concentration was estimated to be 2×1017 cm-3 from capacitance measurements of the Schottky diodes as a first approximation.
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