Improvement characteristics of homoepitaxial GaAs grown by atomic hydrogen-assisted molecular beam epitaxy

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作者
Wang, Hailong [1 ]
Zhu, Haijun [1 ]
Ning, Dong [1 ]
Wang, Hui [1 ]
Wang, Xiaodong [1 ]
Guo, Zhongsheng [1 ]
Feng, Songlin [1 ]
机构
[1] Inst of Semiconductors, Chinese Acad of Sciences, Beijing, China
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11
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页码:191 / 193
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