Methods for fabricating arrays of holes using interference lithography

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作者：
Fernandez, A.
Decker, J.Y.
Herman, S.M.
Phillion, D.W.
Sweeney, D.W.
Perry, M.D.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1997年 / 15卷 / 06期
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