Defect density and atomic bond structure of tetrahedral amorphous carbon (ta-C) films prepared by filtered vacuum arc process

被引：0
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作者：
Lee, Churl Seung [1 ,2 ,3 ]
Shin, Jin-Koog [1 ,3 ]
Eun, Kwang Yong [1 ]
Lee, Kwang-Ryeol [1 ]
Yoon, Ki Hyun [1 ,2 ]
机构：
[1] Future Technology Research Division, Korea Inst. of Sci. and Technology, P.O. Box 131, Cheongryang, Seoul, 136-791, Korea, Republic of
[2] Department of Ceramic Engineering, Yonsei University, Seoul, 120-749, Korea, Republic of
[3] NANO Technol. Based Info./E.S.R.C., Korea Electron. Technology Institute, Pyungtaek, Kyunggi, 451-865, Korea, Republic of
来源：
Journal of Applied Physics | 2004年 / 95卷 / 09期
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页码：4829 / 4832
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