Textures in thin films

The formation of polycrystalline films by the Volmer-Weber process is considered. Film formation is divided into two stages: 1) nucleation and coalescence and 2) growth. The development of texture cannot be viewed in isolation so its understanding must be coupled to the kinetic processes that control nucleation, coalescence, and growth. Texture during the nucleation and coalescence stage is influenced by stable cluster configurations, surface energy anisotropy, and surface diffusivity, Ds. Impurities can substantially alter these quantities. Growth is considered in the context of the Structure Zone Model. The important processes are both the interfacial energy and Ds, as above, and the grain boundary mobility and lattice diffusivity; the relative contribution of each changes with T/Tm. The influence of all parameters on all stages of film formation are considered from the standpoint of texture development.