Determination of stress gradients in a thermally grown oxide layer using X-ray diffraction

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作者：
Zhu, D. [1 ]
Stout, J.H. [1 ]
Shores, D.A. [1 ]
机构：
[1] Univ of Minnesota, Minneapolis, United States
来源：
Materials Science Forum | 1997年 / 251-254卷 / part 1期
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页码：333 / 340
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