Stress Effect on Aluminum-Induced Crystallization of Sputtered Amorphous Silicon Thin Films

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[1] Hsu, Ching-Ming
[2] Chen, Ian-Fu
[3] Yu, Ming-Chang
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Hsu, C.-M. (tedhsu@mail.stut.edu.tw) | 1600年 / Japan Society of Applied Physics卷 / 42期
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