Silicon-based ultrathin dielectrics

被引：0

作者：

Thakur, R.P.S. ^{[1
,2
]}

Chen, Y. ^{[3
]}

Poindexter, E.H. ^{[4
]}

Singh, R. ^{[5
,6
]}

机构：

[1] Strategic Technologies

[2] Steag Electronik Systems, San Jose, CA, United States

[3] Bell Laboratories, Lucent Technologies, Orlando, FL, United States

[4] Army Research Laboratory, Adelphi, MD, United States

[5] Holcombe Dept. Elec. and Comp. Eng.

[6] Center for Silicon Nanoelectronics, Clemson University, Clemson, SC, United States

来源：

| 1999年 / Electrochemical Soc Inc, Pennington, NJ, United States卷 / 08期

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D O I：

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摘要：

引用

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