Silicon-based ultrathin dielectrics

被引：0
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作者：
Thakur, R.P.S. [1 ,2 ]
Chen, Y. [3 ]
Poindexter, E.H. [4 ]
Singh, R. [5 ,6 ]
机构：
[1] Strategic Technologies
[2] Steag Electronik Systems, San Jose, CA, United States
[3] Bell Laboratories, Lucent Technologies, Orlando, FL, United States
[4] Army Research Laboratory, Adelphi, MD, United States
[5] Holcombe Dept. Elec. and Comp. Eng.
[6] Center for Silicon Nanoelectronics, Clemson University, Clemson, SC, United States
来源：
| 1999年 / Electrochemical Soc Inc, Pennington, NJ, United States卷 / 08期
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