Irreversible optical properties of AgOx mask layer with temperature for super-resolution near-field structure application investigated by in situ, ex situ ellipsometry

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[1] Xuezhe, L.I.
[2] Kim, Sang Jun
[3] An, Sung Hyuck
[4] Kim, Sang Youl
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Xuezhe, L.I. | 1600年 / Japan Society of Applied Physics卷 / 43期
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