Thermodynamic analysis of hydride vapor phase epitaxy of GaN

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作者：
Koukitu, Akinori [1 ]
Hama, Shin-ichi [1 ]
Taki, Tetsuya [1 ]
Seki, Hisashi [1 ]
机构：
[1] Tokyo Univ of Agriculture and, Technology, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 3 A期
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页码：762 / 765
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