Model for the formation of oxidation-induced stacking faults in Czochralski silicon

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[1] Sadamitsu, Shinsuke
[2] Okui, Masahiko
[3] Sueoka, Koji
[4] Marsden, Kieran
[5] Shigematsu, Tatsuhiko
来源：
Sadamitsu, Shinsuke | 1600年 / JJAP, Minato-ku, Japan卷 / 34期
关键词：
Stacking faults;
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