Effect of ion bombardment on the properties of hydrogenated amorphous silicon prepared from undiluted and xenon-diluted silane

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[1] Dutta, Joydeep
[2] Hasezaki, Kazuhiro
[3] Mashima, Satoshi
[4] McElheny, Peter
[5] Suzuki, Atsushi
[6] Ganguly, Gautam
[7] Matsuda, Akihisa
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Dutta, Joydeep | 1600年 / 31期
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