Study of a new type of SAW resonator pressure sensor

被引:0
|
作者
Fan, Dongyuan
Chen, Ming
机构
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:7 / 10
相关论文
共 50 条
  • [31] Platinum/AlN/Sapphire SAW resonator operating in GHz range for High temperature Wireless SAW sensor
    Blampain, E.
    Elmazria, O.
    Legrani, O.
    Mc Murtry, S.
    Montaigne, F.
    Fu, C.
    Lee, K. K.
    Yang, S. S.
    2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2013, : 1073 - 1076
  • [32] A New Simulation Model for Nonlinearity of SAW Resonator Filters
    Nako, Katsuhiro
    Nakagawa, Ryo
    Suzuki, Takanao
    Takigawa, Kazuhiro
    Shimizu, Hiroshi
    Kyouya, Haruki
    2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, : 1842 - 1845
  • [33] A new type of infrared-sensitive resonator used as a thermal sensor
    Hamrour, MR
    Galliou, S
    Dulmet, B
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 65 (2-3) : 147 - 151
  • [34] Research of SAW Temperature and Pressure Dual Parameter Measuring Sensor Based on Delay Line Type
    Li, Yuanyuan
    Yang, Gang
    Cao, Le
    Jiang, Bei
    Ji, Xuemi
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2020, 63 (05) : 707 - 715
  • [35] Research of SAW Temperature and Pressure Dual Parameter Measuring Sensor Based on Delay Line Type
    Yuanyuan Li
    Gang Yang
    Le Cao
    Bei Jiang
    Xuemi Ji
    Instruments and Experimental Techniques, 2020, 63 : 707 - 715
  • [36] Passive remote sensing for temperature and pressure using SAW resonator devices
    Buff, W
    Klett, S
    Rusko, M
    Ehrenpfordt, J
    Goroll, M
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1998, 45 (05) : 1388 - 1392
  • [38] The Influence of Pressure on the TCF of AlN-Based SAW Pressure Sensor
    Pan, Shuliang
    Memon, Maria Muzamil
    Wan, Jiang
    Wang, Tao
    Zhang, Wanli
    IEEE SENSORS JOURNAL, 2022, 22 (04) : 3097 - 3104
  • [39] SENSOR CALIBRATION OF A SAW RESONATOR FOR ABSOLUTE-HUMIDITY MEASUREMENTS IN MICROELECTRONIC PACKAGES
    HUANG, PH
    SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) : 686 - 688
  • [40] Progress of Matching Network for Passive Remote Hybrid Sensor Based on SAW Resonator
    Fu, Qiuyun
    Wang, Jianling
    Luo, Wei
    Zhou, Dongxiang
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 1512 - 1515