Chemical and tribological studies of MoS2 films on SiC substrates

被引:0
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作者
Didziulis, Stephen V. [1 ]
Fleischauer, Paul D. [1 ]
Soriano, Bonnie L. [1 ]
Gardos, Michael N. [1 ]
机构
[1] Aerospace Corp, Los Angeles, United States
来源
| 1600年 / 44期
关键词
Molybdenum Disulfide - Radio Frequency Sputtering;
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页码:1 / 3
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