Controlled Placement of Self-Organized Ge Dots on Patterned Si (001) Surfaces

被引：0
|
作者：
Lee, Huang-Ming [1 ]
Yang, Tsung-Hsi [1 ]
Luo, Guangli [2 ]
Chang, Edward Yi [1 ]
机构：
[1] Dept. of Mat. Sci. and Engineering, National Chiao Tung University, Hsinchu 300, Taiwan
[2] Microelectron./Info. Syst. Res. Ctr., National Chiao Tung University, Hsinchu 300, Taiwan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2004年 / 43卷 / 2 B期
关键词：
Dots - Mesas - Self-organized - Ultra high-vacuum chemical molecular epitaxy;
D O I：
10.1143/jjap.43.l247
中图分类号：
学科分类号：
摘要：
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