Piezoelectric servo-actuator of LiNbO3 with an integrated sensor

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作者：
Yokoyama, H. [1 ]
Wakatsuki, N. [1 ]
Kudo, S. [1 ]
机构：
[1] Ishinomaki Senshu Univ
来源：
Proceedings of the IEEE Ultrasonics Symposium | 1998年 / 1卷
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页码：551 / 554
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