Dependence of field effect mobilities on substrate temperature for amorphous silicon deposition for amorphous silicon thin film transistors

被引：0
|
作者：
Oyoshi, Keiji [1 ]
Yamaoka, Tomonori [1 ]
Tanaka, Shuhei [1 ]
机构：
[1] Nippon Sheet Glass Co, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1988年 / 27卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
4
引用
收藏
页码：2010 / 2012
相关论文
共 50 条
  • [1] THE DEPENDENCE OF FIELD-EFFECT MOBILITIES ON SUBSTRATE-TEMPERATURE FOR AMORPHOUS-SILICON DEPOSITION FOR AMORPHOUS-SILICON THIN-FILM TRANSISTORS
    OYOSHI, K
    KUSUDA, Y
    YAMAOKA, T
    TANAKA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2010 - L2012
  • [2] Chemical vapour deposition of amorphous silicon with silanes for thin film transistors. The influence of the amorphous silicon deposition temperature
    Breddels, Paul A., 1600, (30):
  • [3] Amorphous silicon thin film transistors
    Lin, Jyh-Ling, 1600, Chinese Inst of Engineers, Taipei, Taiwan (18):
  • [4] CHEMICAL VAPOR-DEPOSITION OF AMORPHOUS-SILICON WITH SILANES FOR THIN-FILM TRANSISTORS - THE INFLUENCE OF THE AMORPHOUS-SILICON DEPOSITION TEMPERATURE
    BREDDELS, PA
    KANOH, H
    SUGIURA, O
    MATSUMURA, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (02): : 233 - 239
  • [5] TEMPERATURE-DEPENDENCE OF HYDROGENATED AMORPHOUS-SILICON THIN-FILM TRANSISTORS
    CHEN, BY
    WU, WH
    CHEN, JR
    HONG, CS
    JOURNAL OF MATERIALS SCIENCE, 1995, 30 (09) : 2254 - 2256
  • [6] Influence of Silicon Nitride and Amorphous Silicon on the Stability of Amorphous Silicon Thin-Film Transistors
    Hou, Chih-Yuan
    Lin, Shin-Hua
    Chang, Jun-Kai
    Chen, Hsin-Li
    Chen, Chien-Hung
    IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 723 - 726
  • [7] Effects of the deposition sequence on amorphous silicon thin-film transistors
    Hiranaka, Kouichi, 1600, (28):
  • [8] Hydrogenation of amorphous silicon thin film transistors
    Kuo, Y
    PROCEEDINGS OF THE FOURTH SYMPOSIUM ON THIN FILM TRANSISTOR TECHNOLOGIES, 1999, 98 (22): : 191 - 197
  • [9] Stability of amorphous silicon thin film transistors
    Wehrspohn, RB
    Deane, SC
    French, ID
    Hewett, J
    Powell, MJ
    AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999, 1999, 557 : 365 - 370
  • [10] Amorphous Silicon Thin Film Transistors.
    Pietruszko, Stanislaw
    Elektronika Warszawa, 1987, 28 (2-3): : 10 - 14
12345