Electrical properties of Pb(Zr, Ti)O3 thin film capacitors on Pt and Ir electrodes

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作者
Nakamura, Takashi [1 ]
Nakao, Yuichi [1 ]
Kamisawa, Akira [1 ]
Takasu, Hidemi [1 ]
机构
[1] Rohm Co, Ltd, Kyoto, Japan
关键词
Ferroelectric materials;
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页码:5184 / 5187
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