LASER-OSCILLATING-MODE DEPENDENCE OF TEMPERATURE DISTRIBUTIONS IN LASER ANNEALING OF SEMICONDUCTORS.

被引：0
|
作者：
Yamada, Masayoshi
Ariyoshi, Hiroshi
Yamamoto, Keiichi
Abe, Kenji
机构：
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1983年 / 22卷 / 10期
关键词：
D O I：
10.1143/jjap.22.1546
中图分类号：
学科分类号：
摘要：
Semiconductor materials
引用
收藏
页码：1546 / 1552
相关论文
共 50 条
  • [1] LASER-OSCILLATING-MODE DEPENDENCE OF TEMPERATURE DISTRIBUTIONS IN LASER ANNEALING OF SEMICONDUCTORS
    YAMADA, M
    ARIYOSHI, H
    YAMAMOTO, K
    ABE, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (10): : 1546 - 1552
  • [2] EFFICIENCY OF LASER DOPING OF SEMICONDUCTORS.
    Gorin, E.A.
    Soviet physics. Semiconductors, 1984, 18 (09): : 1062 - 1063
  • [3] LASER ANNEALING OF SEMICONDUCTORS
    WEAIRE, D
    WILSON, JIB
    NATURE, 1978, 276 (5689) : 668 - 669
  • [4] LASER ANNEALING OF SEMICONDUCTORS
    CELLER, GK
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (10) : 1461 - 1461
  • [5] MEASUREMENTS OF THE MELT DYNAMICS IN LASER ANNEALED SEMICONDUCTORS.
    Peercy, P.S.
    Calvin, G.J.
    Thompson, M.O.
    Mayer, J.W.
    Hammond, R.B.
    Physica B: Physics of Condensed Matter & C: Atomic, Molecular and Plasma Physics, Optics, 1982, 116 B&C (1-3): : 558 - 563
  • [6] PHYSICS OF LASER ANNEALING OF SEMICONDUCTORS
    BLOEMBERGEN, N
    KURZ, H
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1984, 1 (03) : 446 - 446
  • [7] LASER ANNEALING OF AIIIBV SEMICONDUCTORS
    KURBATOV, LN
    STOIANOVA, IG
    TROKHIMCHUK, PP
    TROKHIN, AS
    DOKLADY AKADEMII NAUK SSSR, 1983, 268 (03): : 594 - 597
  • [8] PULSED LASER ANNEALING OF SEMICONDUCTORS
    WHITE, CW
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (03): : 224 - 225
  • [9] LASER ANNEALING OF IMPLANTED SEMICONDUCTORS
    KHAIBULLIN, IG
    SHTYRKOV, EI
    ZARIPOV, MM
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1981, 45 (08): : 1464 - 1473
  • [10] INTERFERENCE LASER ANNEALING OF SEMICONDUCTORS
    ALFEROV, ZI
    ABAKUMOV, VN
    KOVALCHUK, YV
    OSTROVSKAYA, GV
    PORTNOI, EL
    SMIRNITSKII, VB
    SOKOLOV, IA
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1983, 17 (02): : 152 - 155
12345