Measurement of thin film Young's modulus from multilayer membranes

被引：0
|
作者：
Zhou, J.
Huang, Y.P.
Mantell, Suan, C.
机构：
来源：
Dianzi Qijian/Journal of Electron Devices | 2001年 / 24卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Young's modulus of polysilicon thin film evaluated by finite element analysis
    Tanaka, Kazuto
    Minoshima, Kohji
    Imoto, Takehiro
    PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4, 2007, 353-358 : 2227 - +
  • [22] Contactless measurement of Young's modulus using laser beam excitation and detection of vibration of thin-film microresonators
    Kobayashi, T
    Ohsawa, J
    Hara, T
    Yamaguchi, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (03): : 1178 - 1182
  • [23] Simultaneous measurement of the Young's modulus and the Poisson ratio of thin elastic layers
    Gross, Wolfgang
    Kress, Holger
    SOFT MATTER, 2017, 13 (05) : 1048 - 1055
  • [24] Determination of Young's Modulus for Nanofibrillated Cellulose Multilayer Thin Films Using Buckling Mechanics
    Cranston, Emily D.
    Eita, Mohamed
    Johansson, Erik
    Netrval, Julia
    Salajkova, Michaela
    Arwin, Hans
    Wagberg, Lars
    BIOMACROMOLECULES, 2011, 12 (04) : 961 - 969
  • [25] Residual stress and Young's modulus measurement of capacitive micromachined ultrasonic transducer membranes
    Yaralioglu, GG
    Ergun, AS
    Bayram, B
    Marentis, T
    Khuri-Yakub, BT
    2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 953 - 956
  • [26] Young modulus measurement of nanostructured metallic thin films
    Vaz, AR
    Salvadori, MC
    Cattani, M
    ISMANAM 2003: METASTABLE, MECHANICALLY ALLOYED AND NANOCRYSTALLINE MATERIALS, 2004, 20-21 : 758 - 762
  • [27] Nanostructured gold thin films: Young modulus measurement
    Salvadori, MC
    Vaz, AR
    Melo, LL
    Cattani, M
    SURFACE REVIEW AND LETTERS, 2003, 10 (04) : 571 - 575
  • [28] Young modulus measurement of nanostructured palladium thin films
    Vaz, AR
    Salvadori, MC
    Cattani, M
    NANOTECH 2003, VOL 3, 2003, : 177 - 180
  • [29] On the determination of Young's modulus of film by nanoindentation
    Jia, Qipu
    Long, Xu
    2020 IEEE 22ND ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2020, : 228 - 232
  • [30] Young's modulus of a switchable peptide film
    Middelberg, Anton P. J.
    He, Lizhong
    Dexter, Annette F.
    Shen, Hsin-hui
    Holt, Stephen A.
    Thomas, Robert K.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 234
12345