Phase composition and surface morphology of TiC coating by chemical vapor deposition

The TiC coating on the surface of carbon-carbon composites was prepared by chemical vapor deposition method. The effects of process parameters on phase composition and surface morphology of TiC coating as well as the deposition mechanism of TiC were studied. Experimental results have shown that when the ratio of gas flow is H2:TiCl4:CH4 = 300:25:10, there are few floating carbons in the coating. With the increase of CH4, the content of floating carbons is increased. The effect of deposition temperature on the morphology of TiC is that the crystal size of TiC produced at lower temperature is small and well distributed, while larger crystal size of TiC is formed at higher temperature, resulting in poor quality coating.