Growth character and adhesion of cubic boron nitride thin films

被引:0
|
作者
Ma, Xiying
Yue, Jinshun
He, Deyan
Chen, Guanghua
机构
来源
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
下载
收藏
页码:871 / 875
相关论文
共 50 条
  • [11] Effects of Si impurity on the nucleation and growth of cubic boron nitride thin films
    Oba, H.
    Nose, K.
    Yoshida, T.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11): : 5502 - 5505
  • [12] Deposition of cubic boron nitride thin films by IBED
    Kuang, YZ
    Huang, XG
    You, DW
    Wang, XM
    Lin, WL
    MATERIALS CHEMISTRY AND PHYSICS, 1998, 53 (03) : 267 - 270
  • [13] Crystallographic texture in cubic boron nitride thin films
    Medlin, DL
    Friedmann, TA
    Mirkarimi, PB
    Cardinale, GF
    McCarty, KF
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (07) : 3567 - 3571
  • [14] Synthesis and characterization of cubic boron nitride thin films
    Wang, Ming'e, 1600, Science Press (34):
  • [15] Synthesis and properties of cubic boron nitride thin films
    Feldermann, H
    Sebastian, M
    Merk, R
    Restle, M
    Ronning, C
    Hofsass, H
    HARD COATINGS: BASED ON BORIDES, CARBIDES & NITRIDES: SYNTHESIS, CHARACTERIZATION & APPLICATIONS, 1998, : 143 - 152
  • [16] Surface properties of cubic boron nitride thin films
    Deng, Jinxiang
    Chen, Guanghua
    APPLIED SURFACE SCIENCE, 2006, 252 (22) : 7766 - 7770
  • [17] Deposition equipment of cubic boron nitride thin films
    Noma, Masao
    Journal of the Vacuum Society of Japan, 2008, 51 (07) : 499 - 504
  • [18] Optical properties of cubic boron nitride thin films
    School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
    不详
    Gongneng Cailiao, 2006, SUPPL. (273-275):
  • [19] Preparation and characterization of thin cubic boron nitride films
    Bewilogua, K
    Schutze, A
    Walter, H
    Kouptsidis, S
    PROCEEDINGS OF THE SECOND SYMPOSIUM ON III-V NITRIDE MATERIALS AND PROCESSES, 1998, 97 (34): : 134 - 141
  • [20] Adhesion improvement of cubic boron nitride films by in situ annealing
    Yu, J
    Song, SH
    Weng, LQ
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (16-17): : 4737 - 4740