Nanomechanical resonators operating at radio frequencies

We present our recent work on nanomachined electromechanical resonators applied as mechanically flexible beams and tunneling contacts operating in the radio frequency regime. We will discuss how to build Au/Si beams of lengths varying from 1 to 4 μm and width down to only 80 nm. The resonators are machined out of single-crystal silicon-on-insulator (SOI) substrates. We will demonstrate how these nanometer devices can be used to mechanically transfer only a few electrons.