Modeling of growth processes in epitaxial reactors

被引：0
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作者：
Carra, S. [1 ]
Cavallotti, C. [1 ]
Masi, M. [1 ]
机构：
[1] Politecnico di Milano, Milano, Italy
来源：
Materials Science Forum | 1998年 / 276-277卷
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页码：135 / 152
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