Changes of characteristics in AIN ceramics surface by laser irradiation

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[1] Takahashi, Masaaki
[2] Kurihara, Yasutoshi
[3] Yamada, Kazuji
[4] Kanai, Kiyoshi
[5] Kurihara, Koichiro
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Takahashi, Masaaki | 1600年 / 73期
关键词：
Laser Irradiation - Semiconductor Power Devices - Thermally Conductive Ceramics;
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